Silicon Sensors for Electrophysiological Signals Monitoring
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Silicon technology has emerged as a new technology for the fabrication of sensors with low cost and high quality. Silicon sensors are therefore essential for the development of multi-sensor ambulatory monitoring systems which include data reduction and storage.
The state of the art is given of sensors which are all compatible with silicon technology. They are pressure sensors, accelerometers, chemical sensors, flow sensors and biopotential measurement electrodes.
KeywordsPressure Sensor Chemical Sensor Bipolar Transistor Flow Sensor Ambulatory Monitoring
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