Abstract
Silicon technology has emerged as a new technology for the fabrication of sensors with low cost and high quality. Silicon sensors are therefore essential for the development of multi-sensor ambulatory monitoring systems which include data reduction and storage.
The state of the art is given of sensors which are all compatible with silicon technology. They are pressure sensors, accelerometers, chemical sensors, flow sensors and biopotential measurement electrodes.
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© 1984 ECSC, EEC, EAEC, Brussels-Luxembourg
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Sansen, W. (1984). Silicon Sensors for Electrophysiological Signals Monitoring. In: Marchesi, C. (eds) Ambulatory Monitoring. Developments in Cardiovascular Medicine, vol 37. Springer, Dordrecht. https://doi.org/10.1007/978-94-009-6012-1_1
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DOI: https://doi.org/10.1007/978-94-009-6012-1_1
Publisher Name: Springer, Dordrecht
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