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Measuring Microvibrations by Heterodyne Speckle Interferometry

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Optical Metrology

Part of the book series: NATO ASI Series ((NSSE,volume 131))

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Abstract

In-plane as well as out-of-plane displacements and vibrations of objects with diffusely scattering surfaces are measured in real time. Microvibrations with amplitudes down to 1 nm and frequencies up to 5 MHz were analyzed at a spatial resolution of 35 μm.

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References

  1. Dandliker, R. and J.-F. Willemin, Measuring Microvibrations by Heterodyne Speckle Interferometry, Proc.Soc.Photo-Opt. Instrum.Eng. vol. 236 (1980) 83–85.

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  2. Dandliker, R. and J.-F. Willemin, Measuring Microvibrations by Heterodyne Speckle Interferometry, Opt.Lett. 6 (1981) 165–167.

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  3. Willemin, J.-F. and R. Dandliker, Measuring Amplitude and Phase of Microvibrations by Hetrodyne Speckle Interferometry, Opt.Lett. 8 (1983) 102–104.

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  4. Leendertz, J.A. Interferometric Displacement Measurements on Scattering Surfaces Utilizing Speckle Effects, J.Phys.E 3 (1970) 214–218.

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  5. See e.g., Ennos, A.E. Speckle Interferometry, in Pogress in Optics, vol. XVI, E. Wolf, ed. ( North-Holland, Amsterdam, 1978 ), pp. 235–259.

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  6. Willemin, J.-F. Interférométrie Hétérodyne de Speckles: Application à la Mesure de Vibrations Mécaniques Microscopiques, Ph.D.thesis (University of Neuchâtel, 1983 ).

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  7. Lypacewicz, G. and L. Filipczynski, Vibration of Piezoelectric Ceramic Transducers Loaded Mechanically, Proc.Vibration Problems, 11 (1970) 283–299.

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Author information

Authors and Affiliations

  1. Institut de Microtechnique de l’Université, CH-2000, Neuchâtel, Switzerland

    R. Dändliker & J.-F. Willemin

Authors
  1. R. Dändliker
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  2. J.-F. Willemin
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Editor information

Editors and Affiliations

  1. University of Porto, Porto, 4000, Portugal

    Olivério D. D. Soares (Professor of Physics) (Professor of Physics)

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© 1987 Martinus Nijhoff Publishers, Dordrecht

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Dändliker, R., Willemin, JF. (1987). Measuring Microvibrations by Heterodyne Speckle Interferometry. In: Soares, O.D.D. (eds) Optical Metrology. NATO ASI Series, vol 131. Springer, Dordrecht. https://doi.org/10.1007/978-94-009-3609-6_35

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  • DOI: https://doi.org/10.1007/978-94-009-3609-6_35

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-010-8115-3

  • Online ISBN: 978-94-009-3609-6

  • eBook Packages: Springer Book Archive

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