Abstract
Three of several major themes of modern optical metrology are reviewed briefly: effective use of the system operatinq curve, clever use of references or standards, and spectral and temporal measurement of spatial effects. Despite the exciting progress observed a major non-scientific problem is noted: the widespread failure of most academic institutions to treat and teach optical metrology as a coherent discipline. Some reasons for that failure are suggested.
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References
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© 1987 Martinus Nijhoff Publishers, Dordrecht
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Caulfield, H.J. (1987). Optical Metrology - Some Personal Reflections. In: Soares, O.D.D. (eds) Optical Metrology. NATO ASI Series, vol 131. Springer, Dordrecht. https://doi.org/10.1007/978-94-009-3609-6_1
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DOI: https://doi.org/10.1007/978-94-009-3609-6_1
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-010-8115-3
Online ISBN: 978-94-009-3609-6
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