Abstract
Significant progress has been made in the development of analytical techniques for inorganic contamination in the last few years 1,2,3. Ion chromatography, in conjunction with resistivity monitoring, is able to detect and to identify individual ionic compounds even before their levels can become critical to production yields 4,5.
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Literature
J.P. Denoncourt and Y. Egozy, “Trace-Level Analysis of High Purity Water Part I - Inorganic Ions”; Ultrapure Water July/August 1986, p. 40.
P.M. Pecevich, “Ion Chromatography Gives Fast Assurance of Product Quality”; Research and Development, September 1985.
P.R. Haddad and P. Jandik, “Detection Methods in Ion Chromatography”; in J. Tarter, Editor, Ion Chromatography, M. Dekker 1986.
J. King, “First Pure Water Guidelines Published by SEMI”; Microcontamination, September 1986, p. 89.
SEMI Technical Document 1-85 “Guidelines for Pure Water”; SEMI, 805 E. Middlefield Rd., Mountain View, CA 94043.
ASTM Committee D-19.11 Preliminary Document 2/8/83.
Plessey Research “Guidelines for Final Rinse Water” accepted for nationwide use in U.K. by Semiconductor Manufacturers Plant Consortium Water Purification Working Party. Available upon request from: D.A. Stewart, Plessey Research, Caswell Towcester, Northants, U.K.
P.A. McConnelee, S. J. Poirier and R. Hanselka “The Role of Water Quality Improvements in VLSI Defect Density”; 5th Semiconductor Pure Water Conference, January 1986, Transcripts available from P.S. Westly, 3697 South Court, Palo Alto, CA 94306.
P.A. McConnelle, S.J. Poirier and R. Hanselka “Water Quality Improvements and VLSI Defect Density”; Semiconductor International, August 1986, p. 82.
D.A. Stewart, A.J. Brinklow, P. Jandik and A.L. Heckenberg to be presented at SemiCon Europe, Zurich, March 1987.
W. Staal, “Applications of HPLC in the Environmental Analysis”; 1st Waters Worldwide Technical Meeting, July 1984, Milford, MA 01757.
J.W. Miller, 3M Center, Maplewood, MN 55144, Personal Communication.
J.B. Reust and V. Meyer, “Determination of Organic Contaminants in Ultra-Pure Water by Reversed-Phase HPLC with U.V. Detection”; Analyst, 107, 756 (1982).
D.A. Stewart, A.J. Brinklow and J. Hewitt, “Design Criteria in Semiconductor Rinse Mains”; 4th Semiconductor Pure Water Conference, January 1985, San Francisco. Same address as in Reference 8.
M.K. Balazs, “Identification of Contaminants in Semiconductor Processing”; Balazs Analytical Laboratory, 2284 Old Middlefield Way, Mountain View, CA 94043.
E.T. Gjessing, Physical and Chemical Characteristics of Aquatic Humus, Ann Arbor Sci. Pubi., Ann Arbor, MI 1976.
J.P. Martin, K. Haider, W.J. Farmer and F. Fuster-Mathon, Soil Biol. Biochem., 6, 221 (1974).
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© 1987 Elsevier Applied Science Publishers Ltd
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Jandik, P., Heckenberg, A.L., Egozy, Y., Denoncourt, J., Stewart, D.A., Brinklow, A.J. (1987). Application of a Diode Array UV Detector for Chromatographic Evaluation of Processes Used in Making High Purity Water. In: Williams, P.A., Hudson, M.J. (eds) Recent Developments in Ion Exchange. Springer, Dordrecht. https://doi.org/10.1007/978-94-009-3449-8_11
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DOI: https://doi.org/10.1007/978-94-009-3449-8_11
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