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Measuring EEDF in Gas Discharge Plasmas

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Book cover Plasma-Surface Interactions and Processing of Materials

Part of the book series: NATO ASI Series ((NSSE,volume 176))

Abstract

The plasma probe diagnostic is the primary technique for obtaining information concerning the plasma parameters in low pressure gas discharges. In its classical application, known as the Langmuir technique, the probe method allows us to find the basic plasma parameters: the plasma density and the electron temperature. Once these parameters are obtained, we have enough information for the calculation of plasma hydrodynamic processes. The problem arises when one tries to calculate the rates of non-elastic interactions of the plasma electrons with molecules and ions using the measured electron temperature of the low energy electrons.

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Author notes

  1. V. A. Godyak

    Present address: GTE Laboratories, Inc., 40 Sylvan Road, Waltham, MA, 02254, USA

Authors and Affiliations

  1. GTE Products Corporation, Danvers, MA, 01923, USA

    V. A. Godyak

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Editors and Affiliations

  1. Microelectronics Center of North Carolina, Research Triangle Park, North Carolina, USA

    Orlando Auciello

  2. North Carolina State University, Research Triangle Park, North Carolina, USA

    Orlando Auciello

  3. University of Alicante, Alicante, Spain

    Jose Antonia Valles-Abarca

  4. AT&T Bell Laboratories, Murray Hill, New Jersey, USA

    Daniel L. Flamm

  5. University of California, Berkeley, USA

    Daniel L. Flamm

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© 1990 Kluwer Academic Publishers

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Godyak, V.A. (1990). Measuring EEDF in Gas Discharge Plasmas. In: Auciello, O., Gras-Marti, A., Valles-Abarca, J.A., Flamm, D.L. (eds) Plasma-Surface Interactions and Processing of Materials. NATO ASI Series, vol 176. Springer, Dordrecht. https://doi.org/10.1007/978-94-009-1946-4_4

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  • DOI: https://doi.org/10.1007/978-94-009-1946-4_4

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-010-7369-1

  • Online ISBN: 978-94-009-1946-4

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