Abstract
As it is well known, when an ion beam traverses a thin solid foil, the ions are slowed down and dispersed in energy.
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References
F.K. Chen, R. Laubert and W. Brandt (unpublished); N.E. Capuj, J.C. Eckardt, G.H. Lantschner and N.R. Arista, Phys. Rev. A36, 3715 (1987).
F. Besenbacher, J.U. Andersen and E. Bonderup, Nucl. Instr. and Methods 168, 1 (1980).
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© 1990 Kluwer Academic Publishers
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Capuj, N.E., Arista, N.R., Lantchsner, G.H., Eckardt, J.C., Jakas, M.M. (1990). Thin Film Inhomogeneity Characterization by Ion Beam Technique. In: Auciello, O., Gras-Marti, A., Valles-Abarca, J.A., Flamm, D.L. (eds) Plasma-Surface Interactions and Processing of Materials. NATO ASI Series, vol 176. Springer, Dordrecht. https://doi.org/10.1007/978-94-009-1946-4_25
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DOI: https://doi.org/10.1007/978-94-009-1946-4_25
Publisher Name: Springer, Dordrecht
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