Skip to main content
SpringerLink
Log in

The Physics of the Sputter Erosion Process

  • Chapter
Book cover Plasma-Surface Interactions and Processing of Materials

Part of the book series: NATO ASI Series ((NSSE,volume 176))

  • 423 Accesses

Abstract

When an energetic atom or ion hits a solid surface, atoms, molecules and clusters may be ejected as a consequence of the energy and momentum deposited in the solid. This phenomenon is known as sputtering and has been first described in 1853, when a glow discharge cathode was pulverized.1 Sputtering constitutes a process that is of considerable importance in the field of glow discharges, plasma treatment of materials, and plasma deposition techniques, cf. elsewhere in these proceedings.2

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 259.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 329.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 329.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. Grove WR, Philos Mag 5 (1853) 203.

    Google Scholar 

  2. Harper JME, these proceedings; Greene JE, these proceedings.

    Google Scholar 

  3. Lindhard J, Nielsen V, Scharff M, Mat Fys Medd Dan Vid Selsk 36, no 10 (1968).

    Google Scholar 

  4. Sigmund P, Rev Roum Phys 17 (1972) 823; 969; 1079.

    CAS  Google Scholar 

  5. Wilson WD, Haggmark LG, Biersack JP, Phys Rev B15 (1977) 2458.

    Google Scholar 

  6. Kobayashi S, Matsukuma T, Nagai S, Umeda K, J Phys Soc Jpn 10 (1955) 759.

    Article  Google Scholar 

  7. Landau LD, Lifshitz EM, Mechanics (Pergamon, Oxford 1960);

    Google Scholar 

  8. Landau LD, Lifshitz EM, Quantum Mechanics (Pergamon, Oxford 1958).

    Google Scholar 

  9. Sigmund P, in Sputtering by Particle Bombardment, vol 1, Behrisch R (ed) (Springer, Berlin, 1981), p 9.

    Google Scholar 

  10. For a recent critical discussion cf.: Vicanek M, Jimenez Rodriguez JJ, Sigmund P, Nucl Instr Meth B36 (1989) 124.

    Google Scholar 

  11. Andersen HH, Nucl Instr Meth B18 (1987) 321.

    CAS  Google Scholar 

  12. Biersack JP, Eckstein W, Appl Phys A34 (1984) 73.

    CAS  Google Scholar 

  13. Robinson MT, Torrens IM, Phys Rev B9 (1974) 5008.

    Google Scholar 

  14. Harrison DE, Jr, Rad Effects 70 (1983) 1.

    Article  CAS  Google Scholar 

  15. Sigmund P, Robinson MT, Baskes MI, Hautala M, Cui FZ, Eckstein W, Yamamura Y, Hosaka S, Ishitani T, Shulga VI, Harrison, Jr, DE, Chakarov IR, Karpuzov DS, Kawatoh E, Shimizu R, Valkealahti S, Nieminen RM, Betz G, Husinsky W, Shapiro MH, Vicanek M, Urbassek HM, Nucl Instr Meth B36 (1989) 110.

    CAS  Google Scholar 

  16. Sigmund P, Phys Rev 184 (1969) 383;

    Article  CAS  Google Scholar 

  17. Sigmund P, Phys Rev 187 (1969) 768.

    Article  Google Scholar 

  18. Sigmund P, Nucl Instr Meth B27 (1987) 1.

    CAS  Google Scholar 

  19. Andersen HH, Bay HL, J Appl Phys 45 (1974) 953;

    Article  CAS  Google Scholar 

  20. Andersen HH, Bay HL, J Appl Phys 46 (1975) 2416.

    Article  CAS  Google Scholar 

  21. Andersen HH, Bay HL, in Sputtering by Particle Bombardment, vol 1, Behrisch R (ed) (Springer, Berlin, 1981), p 145.

    Google Scholar 

  22. Falcone G, Sigmund P, Appl Phys 25 (1981) 307.

    Article  CAS  Google Scholar 

  23. Thompson MW, Philos Mag 18 (1968) 377.

    Article  CAS  Google Scholar 

  24. Andersen HH, Stenum B, Sørensen T, Whitlow HJ, Nucl Instr Meth B6 (1985) 459.

    CAS  Google Scholar 

  25. Waldeer KT, Urbassek HM, Nucl Instr Meth B18 (1987) 518.

    CAS  Google Scholar 

  26. Littmark U, Hofer WO, J Mater Sei 13 (1978) 2577.

    Article  CAS  Google Scholar 

  27. Sigmund P, Oliva A, Falcone G, Nucl Instr Meth 194 (1982) 541.

    Article  CAS  Google Scholar 

  28. Wehner GK, Rosenberg D, J Appl Phys 31 (1960) 177.

    Article  CAS  Google Scholar 

  29. Waldeer KT, Urbassek HM, Appl Phys A45 (1988) 207;

    Google Scholar 

  30. Vicanek M, Urbassek HM, Nucl Instr Meth B30 (1988) 507.

    Google Scholar 

  31. Dembowski J, Oechsner H, Yamamura Y, Urbassek HM, Nucl Instr Meth B18 (1987) 464.

    CAS  Google Scholar 

  32. Urbassek HM, Nucl Instr Meth B4 (1984) 356;

    Google Scholar 

  33. Urbassek HM, Nucl Instr Meth B6 (1985) 585.

    Google Scholar 

  34. Yamamura Y, Bohdanski J, Vacuum 35 (1985) 561.

    Article  CAS  Google Scholar 

  35. Andersen N, Sigmund P, Mat Fys Medd Dan Vid Selsk 39, no 3 (1974).

    Google Scholar 

  36. Andersen HH, in: Ion Implantation and Beam Processing, Williams JS, Poate JM (eds) (Academic Press, Sydney 1984) p 127.

    Google Scholar 

  37. Andersen HH, Besenbacher F, Goddiksen P, in: Symposium on Sputtering, Varga P, Betz G, Viehböck FP (eds), (Institut für Allgemeine Physik, Vienna 1980) p 446.

    Google Scholar 

  38. Liau ZL, Mayer JW, Brown WL, Poate JM, J Appl Phys 49 (1978) 5295.

    Article  CAS  Google Scholar 

  39. Behrisch R (ed), Sputtering by Particle Bombardment, vol 1, 2 (Springer, Berlin 1981, 1983).

    Google Scholar 

  40. Ziegler JF, Biersack JP, Littmark U, Stopping Powers and Ranges of Ions in Matter, vol 1, Ziegler JF (ed) (Pergamon, New York 1985).

    Google Scholar 

  41. Zalm PC, Surf Interface Anal 11 (1988) 1.

    Article  CAS  Google Scholar 

  42. Schou J, Nucl Instr Meth B27 (1987) 188.

    CAS  Google Scholar 

  43. Townsend PD, Browning R, Garlant DJ, Kelly JC, Mahjoobi A, Michael AJ, Saidoh M, Rad Effects 30 (1976) 55.

    Article  CAS  Google Scholar 

  44. Auciello O, these proceedings.

    Google Scholar 

  45. Urbassek HM, Nucl Instr Meth B18 (1987) 587.

    CAS  Google Scholar 

  46. Urbassek HM, Nucl Instr Meth B31 (1988) 541;

    CAS  Google Scholar 

  47. Radiat Eff Def Solids 109 (1989) 293.

    Google Scholar 

  48. Betz G, Nucl Instr Meth B27 (1987) 104.

    CAS  Google Scholar 

  49. Yu ML, in Many-Body Phenomena at Surfaces, Langreth D, Suhl H (eds) (Academic Press, Orlando 1984) p 467;

    Google Scholar 

  50. Lang ND, ibid p 481.

    Google Scholar 

  51. Robinson MT, in Sputtering by Particle Bombardment, vol 1, Behrisch R (ed) (Springer, Berlin, 1981), p 73.

    Google Scholar 

  52. Kiriakidis G, Carter G, Whitton JL (eds), Erosion and Growth of Solids Stimulated by Atom and Ion Beams (Nijhoff, Dordrecht 1986).

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Institut für Theoretische Physik, TU, P. O. Box 3329, D-3300, Braunschweig, Germany

    Herbert M. Urbassek

Authors
  1. Herbert M. Urbassek
    View author publications

    You can also search for this author in PubMed Google Scholar

Editor information

Editors and Affiliations

  1. Microelectronics Center of North Carolina, Research Triangle Park, North Carolina, USA

    Orlando Auciello

  2. North Carolina State University, Research Triangle Park, North Carolina, USA

    Orlando Auciello

  3. University of Alicante, Alicante, Spain

    Jose Antonia Valles-Abarca

  4. AT&T Bell Laboratories, Murray Hill, New Jersey, USA

    Daniel L. Flamm

  5. University of California, Berkeley, USA

    Daniel L. Flamm

Rights and permissions

Reprints and permissions

Copyright information

© 1990 Kluwer Academic Publishers

About this chapter

Cite this chapter

Urbassek, H.M. (1990). The Physics of the Sputter Erosion Process. In: Auciello, O., Gras-Marti, A., Valles-Abarca, J.A., Flamm, D.L. (eds) Plasma-Surface Interactions and Processing of Materials. NATO ASI Series, vol 176. Springer, Dordrecht. https://doi.org/10.1007/978-94-009-1946-4_15

Download citation

  • DOI: https://doi.org/10.1007/978-94-009-1946-4_15

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-010-7369-1

  • Online ISBN: 978-94-009-1946-4

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics

Search

Navigation