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Laser-Induced Fluorescence Measurements of Ion Distribution Functions

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Book cover Plasma-Surface Interactions and Processing of Materials

Part of the book series: NATO ASI Series ((NSSE,volume 176))

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Abstract

Ion velocity distribution functions are often measured in experiments in basic plasma, fusion plasmas, and plasma processing. Laser-induced fluorescence (LIF) is a technique for making these measurements locally, without perturbing the plasma, by measuring the ions’ Doppler-broadened spectral line shape and correcting for other causes of broadening. A narrow-bandwidth tunable laser is required for the’sub-Doppler” measurements.

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Reference

  1. M.J. Goeckner and J. Goree, J. Vac. Sci. Technol. A (May/Tune 1988).

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© 1990 Kluwer Academic Publishers

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Goree, J., Goeckner, M.J. (1990). Laser-Induced Fluorescence Measurements of Ion Distribution Functions. In: Auciello, O., Gras-Marti, A., Valles-Abarca, J.A., Flamm, D.L. (eds) Plasma-Surface Interactions and Processing of Materials. NATO ASI Series, vol 176. Springer, Dordrecht. https://doi.org/10.1007/978-94-009-1946-4_10

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  • DOI: https://doi.org/10.1007/978-94-009-1946-4_10

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-010-7369-1

  • Online ISBN: 978-94-009-1946-4

  • eBook Packages: Springer Book Archive

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