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The Chemistry of Transition Metal Carbides and Nitrides pp 473–488Cite as

Study of the Auger metal peak of carbides and nitrides by factor analysis

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Abstract

A new method of interpreting Auger electron spectroscopy (AES) sputter profiles of transition metal carbides and nitrides is proposed. It is shown that the chemical information hidden in the shape of the peaks, and usually neglected in depth profiles, can be successfully extracted by factor analysis (FA). The various carbide and nitride phases of model samples were separated by application of FA to the spectra recorded during AES depth profiles. The different chemical states of carbon, nitrogen and metal were clearly identified.

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Author information

Authors and Affiliations

  1. Analytical Chemistry Dept., Université Libre de Bruxelles, cp 255, Bd. du Triomphe 2, 1050, Bruxelles, Belgium

    F. Reniers

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  1. F. Reniers
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Editor information

Editors and Affiliations

  1. Department of Chemical Engineering, Virginia Polytechnic Institute and State University, Blacksburg, Virginia, 24061-0211, USA

    S. T. Oyama (Professor) (Professor)

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© 1996 Chapman & Hall

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Reniers, F. (1996). Study of the Auger metal peak of carbides and nitrides by factor analysis. In: Oyama, S.T. (eds) The Chemistry of Transition Metal Carbides and Nitrides. Springer, Dordrecht. https://doi.org/10.1007/978-94-009-1565-7_26

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  • DOI: https://doi.org/10.1007/978-94-009-1565-7_26

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-010-7199-4

  • Online ISBN: 978-94-009-1565-7

  • eBook Packages: Springer Book Archive

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