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Synthesis of thin films of Cr, Mo and W carbides and nitrides

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The Chemistry of Transition Metal Carbides and Nitrides

Abstract

Thin films of carbides and nitrides of Group 6 metals were synthesized by reaction of a metal film with a reactive gas at high temperature and by reactive sputtering. The phases obtained depended on the experimental conditions. High temperatures metastable phases (β-WC1−x and δ-MoC1−x ) were obtained by reactive sputter deposition of films. The carbon concentration in such films depended on the temperature of the substrate and on the pressure. In some cases ordered sublattices of carbon and nitrogen were observed and epitaxial relationships between the deposit and the substrate were studied.

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Authors and Affiliations

  1. Faculty of Sciences, Analytical Chemistry Dept., Université Libre de Bruxelles, cp 255, Bd. du Triomphe, 2, 1050, Bruxelles, Belgium

    F. Reniers, M. Detroye, S. Kacim, P. Kons, M. Maoujoud, E. Silberberg, M. Soussi el Begrani, T. Vandevelde & C. Buess-Herman

Authors
  1. F. Reniers
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  2. M. Detroye
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  3. S. Kacim
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  4. P. Kons
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  5. M. Maoujoud
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  6. E. Silberberg
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  7. M. Soussi el Begrani
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  8. T. Vandevelde
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  9. C. Buess-Herman
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Editor information

Editors and Affiliations

  1. Department of Chemical Engineering, Virginia Polytechnic Institute and State University, Blacksburg, Virginia, 24061-0211, USA

    S. T. Oyama (Professor) (Professor)

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© 1996 Chapman & Hall

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Reniers, F. et al. (1996). Synthesis of thin films of Cr, Mo and W carbides and nitrides. In: Oyama, S.T. (eds) The Chemistry of Transition Metal Carbides and Nitrides. Springer, Dordrecht. https://doi.org/10.1007/978-94-009-1565-7_14

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  • DOI: https://doi.org/10.1007/978-94-009-1565-7_14

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-010-7199-4

  • Online ISBN: 978-94-009-1565-7

  • eBook Packages: Springer Book Archive

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