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Planar Processing Primer pp 439–491Cite as

Lithography

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Abstract

Etching is used to remove unwanted material and to delineate the regions where material is to be added. The pattern of these regions is specified by the device or circuit designer. The fundamental function of lithography is to transfer the pattern to the wafer itself.

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Authors and Affiliations

  1. University of Illinois, Champaign-Urbana, USA

    George E. Anner (Professor Emeritus of Electrical Engineering)

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  1. George E. Anner
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© 1990 Van Nostrand Reinhold

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Anner, G.E. (1990). Lithography. In: Planar Processing Primer. Springer, Dordrecht. https://doi.org/10.1007/978-94-009-0441-5_11

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  • DOI: https://doi.org/10.1007/978-94-009-0441-5_11

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-010-6682-2

  • Online ISBN: 978-94-009-0441-5

  • eBook Packages: Springer Book Archive

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