Abstract
As material and device length scales decrease, there must be a corresponding increase in the instrumentation resolution for accurate measurements. For these small length scale systems, including thin films, fine grained structures, and matrix composites, nanoindentation experiments provide a proven method for mechanical property measurements. Additionally, when nanoindentation is combined with scanning probe microscopy, individual tests can be placed directly in the regions of interest. However, these tests do not have infinite resolution, as they are limited by the volume probed during a test and the resulting residual damage. Here, an investigation of elastic and plastic mechanical properties is made in relation to the lateral test spacing and the mechanically probed volume. The results clearly show that closely spaced tests having residual plasticity adversely affect neighboring tests, having both poor accuracy and precision in the measurement. This is in contrast to purely elastic tests, which can be closely spaced without affecting accuracy or precision.
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Hangen, U.D., Stauffer, D.D., Asif, S.A.S. (2014). Resolution Limits of Nanoindentation Testing. In: Tiwari, A. (eds) Nanomechanical Analysis of High Performance Materials. Solid Mechanics and Its Applications, vol 203. Springer, Dordrecht. https://doi.org/10.1007/978-94-007-6919-9_5
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DOI: https://doi.org/10.1007/978-94-007-6919-9_5
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