Abstract
Thermal stresses induced during thin film deposition processes usually have important effects on the functionality and reliability of the microdevices used in optical applications. All surface-micromachined thin films are subject to thermal stresses that are usually observed on a substrate when thin film is evaporated on it and when it cools down to a room temperature. This paper presents a surface-micromachined membrane and its numerical model. Comsol Multiphysics is used for comparison of eigenfrequencies of the structure including and excluding thermal stresses.
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Acknowledgments
This research was funded by a grant (No.MIP-060/2012) from the Research Council of Lithuania.
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Malinauskas, K., Ostasevicius, V., Dauksevicius, R. (2012). Impact of Thermal Stresses on Micro-fabricated Devices Used for Optical Applications. In: Beran, J., BÃlek, M., Hejnova, M., Zabka, P. (eds) Advances in Mechanisms Design. Mechanisms and Machine Science, vol 8. Springer, Dordrecht. https://doi.org/10.1007/978-94-007-5125-5_33
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DOI: https://doi.org/10.1007/978-94-007-5125-5_33
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