Skip to main content
SpringerLink
Log in

Positioning Control

  • Chapter
  • First Online:
From scientific instrument to industrial machine

Part of the book series: SpringerBriefs in Electrical and Computer Engineering ((BRIEFSELECTRIC))

  • 808 Accesses

Abstract

In an electron microscope positioning a sample with respect to the electron beam is performed by a motorized stage or by electromagnetic beam deflectors. At nano-scale many non-linear motion effects occur in the stage, of which the most obvious and annoying effect for an operator is the stick-slip effect. This chapter describes a novel and generic method that uses an optimized control system to provide good results in compensating for this effect. A second disturbing effect is the position drift, i.e. the slow movement of a sample relative to the electron beam. This chapter shows the results of our on-line control approach to compensate for position drift using the two positioning mechanisms. High frequency magnetic and mechanical disturbances that irrecoverably blur the image have to be dealt with in a different way. This chapter also describes an innovative approach to eliminate the adverse effects on the image by fast scanning combined with advanced image processing techniques.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 39.99
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 54.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Notes

  1. 1.

    At least at temperatures above absolute zero.

References

  1. R. Pintelon, J. Schoukens, System Identification: A Frequency Domain Approach (IEEE Press, NY, 2001)

    Book  Google Scholar 

  2. J. Schoukens, J. Lataire, R. Pintelon, G. Vandersteen, T. Dobrowiecki, Robustness issues of the best linear approximation of a nonlinear system. IEEE Trans. Instrum. Meas. 58, 1737–1745 (2009). doi:10.1109/TIM.2009.2012948

    Article  Google Scholar 

  3. D.J. Rijlaarsdam, P.W.J.M. Nuij, J. Schoukens, M. Steinbuch, Spectral analysis of block structured nonlinear systems and higher order sinusoidal input describing functions. Automatica 47(12), 2684–2688 (2011). doi:10.1016/j.automatica.2011.08.049

    Article  MATH  Google Scholar 

  4. D.J. Rijlaarsdam, P.W.J.M. Nuij, J. Schoukens, M. Steinbuch, Frequency domain based friction compensation, industrial application to transmission electron microscopes, in Proceedings of American Control Conference, pp. 4093–4098 (2011)

    Google Scholar 

  5. D.J. Rijlaarsdam, P.W.J.M. Nuij, J. Schoukens, M. Steinbuch, Frequency domain based nonlinear feed forward control design for friction compensation. Mech. Syst. Signal Process. 27, 551–562 (2012). doi:10.1016/j.ymssp.2011.08.008

    Article  ADS  Google Scholar 

  6. P.W.J.M. Nuij, O.H. Bosgra, M. Steinbuch, Higher-order sinusoidal input describing functions for the analysis of non-linear systems with harmonic responses. Mech. Syst. Signal Process. 20, 1883–1904 (2006). doi:10.1016/j.ymssp.2005.04.006

    Article  ADS  Google Scholar 

  7. D.J. Rijlaarsdam, V. Van Geffen, P.W.J.M. Nuij, J. Schoukens, M. Steinbuch, Frequency domain based feed forward tuning for friction compensation, in ASPE Spring Topical Meeting, pp. 129–134 (2010)

    Google Scholar 

  8. R.C. Gonzalez, R.E. Woods, Digital Image Processing (Addison-Wesley, Boston, 1992)

    Google Scholar 

  9. B.S. Salmons, D.R. Katz, M.L. Trawick, Correction of distortion due to thermal drift in scanning probe microscopy. Ultramicroscopy 1(3), 339–349 (2010)

    Article  Google Scholar 

  10. M.A. Sutton, J.J. Orteu, H. Schreier, Image Correlation for Shape, Motion and Deformation Measurements: Basic Concepts, Theory and Applications (Springer-Verlag, NY, 2009)

    Google Scholar 

  11. M.A. O’Keefe, B. Parvin, D. Owen, J. Taylor, K.H. Westmacott, W. Johnston, U. Dahmen, Automation for on-line remote-control in situ electron microscopy. Scanning Microsc. 11, 229–239 (1997)

    Google Scholar 

  12. A.N. Tarău, P.W.J.M. Nuij, J. Schoukens, M. Steinbuch, Hierarchical control for drift correction in transmission electron microscopes, in Proceedings of the 19th IEEE International Conference on Control Applications, (2011) pp. 351–356. doi: 10.1109/CCA.2011.6044492

  13. A.N. Tarău, P.W.J.M. Nuij, M. Steinbuch, Model-based drift control for electron microscopes, in Proceedings of the 18th IFAC World Congress, (2011), pp. 8583–8588. doi: 10.3182/20110828-6-IT-1002.02190

  14. S. Skogestad, I. Postlethwaite, Multivariable Feedback Control: Analysis And Design (Wiley, Chichester, 2005)

    Google Scholar 

  15. D.J. Rijlaarsdam, P.W.J.M. Nuij, J. Schoukens, M. Steinbuch, Frequency domain based nonlinear feed forward control design for friction compensation. Mech. Syst. Signal Process. 27, 551–562 (2012). doi:10.1016/j.ymssp.2011.08.008

    Article  ADS  Google Scholar 

  16. J.B. Rawlings, D.Q. Mayne, Model Predictive Control: Theory and Design (Nob Hill Publishing, Madison, 2009)

    Google Scholar 

  17. P.M. Pardalos, M.G.C. Resende, Handbook of Applied Optimization (Oxford University Press, Oxford, 2002)

    MATH  Google Scholar 

  18. D. Rijlaarsdam, B. Van Loon, P. Nuij, M. Steinbuch, Nonlinearities in industrial motion stages–detection and classification, in Proceedings of the American Control Conference, pp. 6644–6649

    Google Scholar 

  19. A.N. Tarău, P.W.J.M. Nuij, M. Steinbuch, Practical approach towards drift correction in electron microscopes, in Technical Report, Control Systems Technology (Eindhoven University of Technology, 2011)

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Research Fellow, Embedded Systems Institute, Den Dolech 2, 5600 MB, Eindhoven, The Netherlands

    Richard Doornbos

  2. Senior Research Fellow, Embedded Systems Institute, Den Dolech 2, 5600 MB, Eindhoven, The Netherlands

    Sjir van Loo

Authors
  1. Richard Doornbos
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Sjir van Loo
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Richard Doornbos .

Editor information

Editors and Affiliations

  1. Embedded Systems Institute, Den Dolech 2, Eindhoven, 5600 MB, Netherlands

    Richard Doornbos

  2. , Senior Research Fellow, Embedded Systems Institute, Den Dolech 2, Eindhoven, 5600 MB, Netherlands

    Sjir van Loo

Rights and permissions

Reprints and permissions

Copyright information

© 2012 The Author(s)

About this chapter

Cite this chapter

Doornbos, R., van Loo, S. (2012). Positioning Control. In: Doornbos, R., van Loo, S. (eds) From scientific instrument to industrial machine. SpringerBriefs in Electrical and Computer Engineering(). Springer, Dordrecht. https://doi.org/10.1007/978-94-007-4147-8_7

Download citation

  • DOI: https://doi.org/10.1007/978-94-007-4147-8_7

  • Published:

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-007-4146-1

  • Online ISBN: 978-94-007-4147-8

  • eBook Packages: EngineeringEngineering (R0)

Publish with us

Policies and ethics

Search

Navigation