Abstract
In this paper we report on the design, fabrication and characterization of an integrated-optic spiral resonator for angular rate sensing applications. The spiral resonator design has been optimized through a parametric analysis and a minimum angular velocity of about 10°/h, suitable for aerospace applications, has been theoretically predicted. The resonator has been fabricated in silica-on-silicon technology and characterized. Experimental results are in good agreement with the theoretical predictions.
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© 2011 Springer Science+Business Media B.V.
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Ciminelli, C., Dell’Olio, F., Campanella, C.E., Armenise, M.N. (2011). Innovative Integrated-Optic Resonator for Angular Rate Sensing: Design and Experimental Characterization. In: Neri, G., Donato, N., d'Amico, A., Di Natale, C. (eds) Sensors and Microsystems. Lecture Notes in Electrical Engineering, vol 91. Springer, Dordrecht. https://doi.org/10.1007/978-94-007-1324-6_54
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DOI: https://doi.org/10.1007/978-94-007-1324-6_54
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