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Smart Multichannel Flow Sensor with Temperature and Pressure Compensation

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Sensors and Microsystems

Part of the book series: Lecture Notes in Electrical Engineering ((LNEE,volume 91))

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Abstract

A compact sensor for measuring multiple gas flows has been designed and fabricated. The device consists in a single silicon chip where three independent flow sensing structures have been included. The sensing structures are differential micro-calorimeters, equipped with double heaters in order to perform drift-free offset compensation. The chip includes also a versatile electronic interface including a low noise chopper amplifier and an original closed loop heater driver capable of reducing the effects of pressure variations on the flow measurement. The chip has been designed using the BCD6s process of STMicroelectronics. A post-processing step, based on anisotropic etching, is required to complete the smart sensor fabrication.

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References

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Acknowledgments

The authors would like to thank the R&D group of the STMicroelectronics of Cornaredo (MI, Italy) for fabrication of the chips described in this work.

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Authors and Affiliations

  1. Dipartimento di Ingegneria dell’Informazione, via G. Caruso, 16, 56122, Pisa, Italy

    P. Bruschi, M. Dei & F. Butti

  2. IEIIT – Pisa, CNR, via G. Caruso, 16, 56122, Pisa, Italy

    M. Piotto

Authors
  1. P. Bruschi
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  2. M. Dei
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  3. F. Butti
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  4. M. Piotto
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Corresponding author

Correspondence to P. Bruschi .

Editor information

Editors and Affiliations

  1. , Dept. of Industrial Chemistry and Materi, University of Messina, Faculty of Engine, Contrada Di Dio, Messina, 98166, Italy

    Giovanni Neri

  2. , Dept. of Matter Physiscs and Electronic, University of Messina, Faculty of Engine, Contrada Di Dio, Messina, 98166, Italy

    Nicola Donato

  3. Dipto. Ingegneria Elettronica, Università di Roma, Tor Vergata, Via del Politecnico 1, Roma, 00133, Italy

    Arnaldo d'Amico

  4. , Dept. of Electronic Engineering, University of Rome Tor Vergata, Via del Politecnico 1, Roma, 00133, Italy

    Corrado Di Natale

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Bruschi, P., Dei, M., Butti, F., Piotto, M. (2011). Smart Multichannel Flow Sensor with Temperature and Pressure Compensation. In: Neri, G., Donato, N., d'Amico, A., Di Natale, C. (eds) Sensors and Microsystems. Lecture Notes in Electrical Engineering, vol 91. Springer, Dordrecht. https://doi.org/10.1007/978-94-007-1324-6_24

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  • DOI: https://doi.org/10.1007/978-94-007-1324-6_24

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  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-007-1323-9

  • Online ISBN: 978-94-007-1324-6

  • eBook Packages: EngineeringEngineering (R0)

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