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EUV radiation of pulse high-current proximity-wallstabilized discharges

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Part of the book series: Springer Proceedings in Physics ((SPPHY,volume 136))

Abstract

Proximity wall stabilized, fast (>4×1011 A/s), high current (>40 kA) discharges are capable to create long, dense, hot, “stable”, non-equilibrium plasma column, suitable e.g. for amplification of EUV and soft X-ray radiation. Amplification on the wavelength of 46,9 nm of Ne-like Ar has been demonstrated by many laboratories; this paper shows its application to micro- and nano-structuring of solid surfaces. Simultaneously, an appraisal study is performed on possibilities to shorten the amplified wavelength: one way uses excited Ni-like Ag ions created at Ag wire explosion in water.

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References

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© 2011 Canopus Academic Publishing Limited

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Kolacek, K. et al. (2011). EUV radiation of pulse high-current proximity-wallstabilized discharges. In: Lee, J., Nam, C.H., Janulewicz, K.A. (eds) X-Ray Lasers 2010. Springer Proceedings in Physics, vol 136. Springer, Dordrecht. https://doi.org/10.1007/978-94-007-1186-0_29

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