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Phase-Sensitive and Fast-Scanning Laser Probe System for RF SAW/BAW Devices

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Book cover IUTAM Symposium on Recent Advances of Acoustic Waves in Solids

Part of the book series: IUTAM Bookseries ((IUTAMBOOK,volume 26))

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Abstract

This paper reviews a phase-sensitive and fast-scanning laser probingsystem developed by the authors’ group for the diagnosis of radio frequency (RF)surface and bulk acoustic wave (SAW/BAW) devices. The system is based on theSagnac interferometer, which is insensitive to low frequency vibration. From thisfeature, we can maximize the scanning speed without sacrificing the signal-tonoiseratio of the measurement. It is demonstrated that high quality twodimensional(2D) image of SAW/BAW field patterns can be captured in minutesorder. Currently the maximum applicable frequency is about 2.5 GHz. Because ofthe phase sensitivity, the measured field in the space domain is readily convertedinto the wavenumber domain by the 2D Fourier Transform. It is also demonstratedhow effective the wavenumber domain analysis is for the purpose.

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Author information

Authors and Affiliations

  1. Graduate School of Engineering, Chiba University, Chiba, 263-8522, Japan

    Ken-ya Hashimoto, Nan Wu, Keisuke Kashiwa, Tatsuya Omori & Masatsune Yamaguchi

  2. Neoark Co. Ltd, Hachi-Ohji, Tokyo, 192-0015, Japan

    Osamu Takano, Sakae Meguro, Naoki Kasai & Koichi Akahane

Authors
  1. Ken-ya Hashimoto
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  2. Nan Wu
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  3. Keisuke Kashiwa
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  4. Tatsuya Omori
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  5. Masatsune Yamaguchi
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  6. Osamu Takano
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  7. Sakae Meguro
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  8. Naoki Kasai
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  9. Koichi Akahane
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Corresponding author

Correspondence to Ken-ya Hashimoto .

Editor information

Editors and Affiliations

  1. Institute of Applied Mechanics, Dept. Mechanical Engineering, National Taiwan University, Roosevelt Road 1, Taipei, 10617, Taiwan R.O.C.

    Tsung-Tsong Wu

  2. Dept. Mechanical Engineering, National Taiwan University, Roosevelt Rd. 1, Taipei, 106, Taiwan R.O.C.

    Chien-Ching Ma

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Hashimoto, Ky. et al. (2010). Phase-Sensitive and Fast-Scanning Laser Probe System for RF SAW/BAW Devices. In: Wu, TT., Ma, CC. (eds) IUTAM Symposium on Recent Advances of Acoustic Waves in Solids. IUTAM Bookseries, vol 26. Springer, Dordrecht. https://doi.org/10.1007/978-90-481-9893-1_22

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  • DOI: https://doi.org/10.1007/978-90-481-9893-1_22

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  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-90-481-9892-4

  • Online ISBN: 978-90-481-9893-1

  • eBook Packages: EngineeringEngineering (R0)

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