Abstract
In this chapter the main ideas of the application of the finite element method for analysis of elastic microsystems are related to the theories of nonlinear vibro-impact oscillations, optimal control and design. The results obtained during simulations indicate that structural parameters of microsystem have significant influence on the dynamical process. Small variations of the parameters, which are common during MEMS fabrication, could be crucial for device performance. From another point of view, the presented herein new discovered phenomena of nonlinear mechanics are related to the possibilities to excite higher modes of vibrations of elastic links due to the local changes of cross-section, location and stiffness of contacting surfaces as well as by means of optimal configurations. This new approach helps designers to create stable and dynamically-reliable microstructures.
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References
Bathe KJ, Wilson EL (1976) Numerical methods in finite element analysis. Prentice-Hall, Englewood Cliffs, NJ
Ostasevicius V (1998) Dynamics and modeling of mechanical structures. Technologija, Kaunas, Lithuania, Lithuanian edition
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Ostasevicius, V., Dauksevicius, R. (2010). Dynamics of Elastic Vibro-Impact Microsystems. In: Microsystems Dynamics. Intelligent Systems, Control and Automation: Science and Engineering, vol 44. Springer, Dordrecht. https://doi.org/10.1007/978-90-481-9701-9_3
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DOI: https://doi.org/10.1007/978-90-481-9701-9_3
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Online ISBN: 978-90-481-9701-9
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