Abstract
The paper provides an overview of a probe storage device development. The main results are related to successful development of ferroelectric memory, MEMS micro-mover with large range of motion and an array of cantilevers with sharp tips (read–write heads), demonstrating wear resistance of the tips, integration of memory material into the MEMS process, integration of MEMS cantilever process with CMOS, development of analog front end electronics, including read channel and servo system, and a controller for a storage device.
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Acknowledgements
The authors are grateful to G. Dunbar, W. Hassler, U. Iflok, N. Franklin, Q. Tran, Z. Tao, N. Tayebi, and S. Yang for technical support and/or fruitful discussions.
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Belov, N. et al. (2010). Nanochip: A MEMS-Based Ultra-High Data Density Memory Device. In: Gusev, E., Garfunkel, E., Dideikin, A. (eds) Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators. NATO Science for Peace and Security Series B: Physics and Biophysics. Springer, Dordrecht. https://doi.org/10.1007/978-90-481-3807-4_4
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DOI: https://doi.org/10.1007/978-90-481-3807-4_4
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