Abstract
Piezoresistance is commonly used in micro-electro-mechanical systems for transducing force, pressure and acceleration. Silicon piezoresistors can be fabricated using ion implantation, diffusion or epitaxy and are widely used for their low cost and electronic readout. However, the design of piezoresistive cantilevers is not a straightforward problem due to coupling between the design parameters, constraints, process conditions and performance. Here we discuss the equations and design principles for piezoresistive cantilevers, and present results from cantilevers and systems that we have developed for probing, mechanics studies and sensing, especially for low stiffness or large bandwidth applications.
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Acknowledgements
Fabrication work was performed in part at the Stanford Nanofabrication Facility (a member of the National Nanotechnology Infrastructure Network) supported by the NSF under Grant ECS-9731293, its lab members, and the industrial members of the Stanford Center for Integrated Systems. This work was supported by the National Institutes of Health under grant EB006745, and the National Science Foundation (NSF) under CAREER Award ECS-0449400, COINS NSF-NSEC ECS-0425914, CPN PHY-0425897, Sensors CTS-0428889 and NER ECCS-0708031. JCD was supported in part by a National Defense Science and Engineering Graduate (NDSEG) Fellowship and an NSF Graduate Research Fellowship. S-JP was supported by a Samsung fellowship.
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Doll, J.C. et al. (2010). Force Sensing Optimization and Applications. In: Gusev, E., Garfunkel, E., Dideikin, A. (eds) Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators. NATO Science for Peace and Security Series B: Physics and Biophysics. Springer, Dordrecht. https://doi.org/10.1007/978-90-481-3807-4_23
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DOI: https://doi.org/10.1007/978-90-481-3807-4_23
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