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Sensors and Microsystems pp 59–62Cite as

Focused Ion Beam and Dielectrophoresis as Grow-in-Place Architecture for Chemical Sensor

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Part of the book series: Lecture Notes in Electrical Engineering ((LNEE,volume 54))

Abstract

In this work, we present a novel architecture for nanodevice manufacturing, combining an electrochemical process, such as dielectrophoresis, with focused ion beam apparatus. This approach simplifies the growth–pattern fabrication and simultaneously demonstrate the possibility to produce single nanowires of different materials with fully controlled dimensions, position, alignment and electrical contacting. Focused Ion Beam is used to deposit platinum microelectrodes on silicon/silicon nitride substrate. Dielectrophoresis is employed for assembling the single nanowire and precisely positioning it between the nanocontacts. Single nanowire based devices are tested as chemical sensors confirming the reliability of this innovative technology.

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Author information

Authors and Affiliations

  1. ENEA Research Center, P.le E. Fermi, 1, 80055, Portici, NA, Italy

    V. La Ferrara, E. Massera & G. Di Francia

  2. University “Federico II”, Piazzale Tecchio 80, 80125, Napoli, Italy

    B. Alfano

Authors
  1. V. La Ferrara
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  2. B. Alfano
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  3. E. Massera
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  4. G. Di Francia
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Editor information

Editors and Affiliations

  1. Dipto. Ingegneria Elettrica, Università di Pavia, Via Ferrata 1, Pavia, 27100, Italy

    Piero Malcovati

  2. Dipto. Fisica, Università Milano-Bicocca, Piazza della Scienza 3, Milano, 20126, Italy

    Andrea Baschirotto

  3. Dipto. Ingegneria Elettronica, Università di Roma, Tor Vergata, Via del Politecnico 1, Roma, 00133, Italy

    Arnaldo d'Amico

  4. Dipto. Ingegneria Eletronica, Universita di Roma - Tor Vergata, Via Orazio Raimondo, Roma, 00173, Italy

    Corrado Natale

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Ferrara, V.L., Alfano, B., Massera, E., Di Francia, G. (2010). Focused Ion Beam and Dielectrophoresis as Grow-in-Place Architecture for Chemical Sensor. In: Malcovati, P., Baschirotto, A., d'Amico, A., Natale, C. (eds) Sensors and Microsystems. Lecture Notes in Electrical Engineering, vol 54. Springer, Dordrecht. https://doi.org/10.1007/978-90-481-3606-3_8

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  • DOI: https://doi.org/10.1007/978-90-481-3606-3_8

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  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-90-481-3605-6

  • Online ISBN: 978-90-481-3606-3

  • eBook Packages: EngineeringEngineering (R0)

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