Abstract
In this paper a piezoelectric ink with curing temperature as low as 150°C is presented. It is intended to be used in MEMS, sensors, actuators and power harvesting field. Ink composition and fabrication steps are described. Electrical characterization of a ink film sample realized with screen printing technology is reported, showing a dielectric constant εr 10 = 100 ± 10%. The ferroelectric hysteresis loop of the piezoelectric ink has been measured by means of a custom PC-based measurement system. A remanent polarization of 0.8 μC/cm2 was measured with a maximum applied electric field of about 13 MV/m. In addition, the possibility of depositing the ink with a drop-on-demand technology was demonstrated, by using a commercial piezoelectric microdispensing device with a 80-μm diameter orifice. Dissolving the PZT ink in ethylene glycol diacetate, wt ratio 1:3, single drops with a diameter of 175 μm have been deposited.
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Ferrari, M., Ferrari, V., Guizzetti, M., Marioli, D. (2010). Piezoelectric Low-Curing-Temperature Ink for Sensors and Power Harvesting. In: Malcovati, P., Baschirotto, A., d'Amico, A., Natale, C. (eds) Sensors and Microsystems. Lecture Notes in Electrical Engineering, vol 54. Springer, Dordrecht. https://doi.org/10.1007/978-90-481-3606-3_12
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DOI: https://doi.org/10.1007/978-90-481-3606-3_12
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