NEMS consist of electronic and nonelectronic components and functions on the nanoscale. These components and functions include sensing, actuation, signal acquisition, and processing. Sometimes display, control, interfacing, and ability to perform chemical and biochemical interactions are also included. NEMS follow both approaches: downscaling previous MEMs components to nanodimensions, and introducing new concepts based on phenomena that are exclusive to nano-regime. Limitations in downscaling are pointed out as well as novel sensing/actuation techniques are presented. NEMS play a critical role in medical diagnostics, displays, energy harvesting, nonvolatile memory, and providing ultra-sharp tips for atomic force microscopy.
Ring Resonator Gauge Factor Nanoelectromechanical System Actuation Displacement Electrothermal Actuation
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