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Nanoelectromechanical Systems (NEMS)

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Integrated Nanoelectronics

Part of the book series: NanoScience and Technology ((NANO))

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Abstract

NEMS consist of electronic and nonelectronic components and functions on the nanoscale. These components and functions include sensing, actuation, signal acquisition, and processing. Sometimes display, control, interfacing, and ability to perform chemical and biochemical interactions are also included. NEMS follow both approaches: downscaling previous MEMs components to nanodimensions, and introducing new concepts based on phenomena that are exclusive to nano-regime. Limitations in downscaling are pointed out as well as novel sensing/actuation techniques are presented. NEMS play a critical role in medical diagnostics, displays, energy harvesting, nonvolatile memory, and providing ultra-sharp tips for atomic force microscopy.

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Author information

Authors and Affiliations

  1. MEMS and Microsensors Group, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan, India

    Vinod Kumar Khanna

Authors
  1. Vinod Kumar Khanna
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Correspondence to Vinod Kumar Khanna .

Review Exercises

Review Exercises

  1. 9.1.

    What are NEMS? Name some materials commonly used in fabrication of NEMS. Compare NEMS with MEMs.

  2. 9.2

    How does the reduction of critical feature size affect the following: (i) power consumption, and (ii) Q-factor?

  3. 9.3

    What are the two sub-classes of NEMs sensors? What is the basis of this classification? Name and define the figure of merit to assess the performance of a downscaled sensor.

  4. 9.4

    Write Stoney’s formula of surface stress. Explain the symbols used.

  5. 9.5

    At what locations are the piezoresistors placed for maximum sensitivity on (i) a cantilever, and (ii) a diaphragm? Explain the working of a piezoresistive pressure sensor.

  6. 9.6

    What types of noises is a piezoresistor susceptible to? How do these noises impact the performances of piezoresistive sensors when their sizes are reduced to nanoscales?

  7. 9.7

    How does the tunneling current vary as a function of distance between the electrode tip and the scanned surface? What makes tunneling sensors ideal for nanoscale?

  8. 9.8

    Name three categories of MEMs sensors which do not perform well at nanodimensions. Enumerate the reasons for this behavior.

  9. 9.9

    What are the merits of CNT-based piezoresistive sensors? Explain with a diagram the operation of a pressure sensor using SWCNT.

  10. 9.10

    What is a NEMS resonator ? How does its sensitivity vary with its resonance frequency?

  11. 9.11

    Write the equation relating the incremental mass placed on a NEMS resonator and the shift in its resonance frequency? Can this device be applied to mass spectrometry?

  12. 9.12

    What is a nanotweezer ? How is it made and how is it used to manipulate nanomaterials?

  13. 9.13

    What is a magnetic bead nanoactuator ? How does it function?

  14. 9.14

    Explain with a diagram the operation of an optical gradient force-driven nanoactuator ? What is the typical range of displacement achieved by Q-factor modulation?

  15. 9.15

    What are the advantages of NEMS memories ? Describe the different two-electrode architectures used for switching between on and off states? How does the three-electrode architecture resemble an FET?

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Khanna, V.K. (2016). Nanoelectromechanical Systems (NEMS). In: Integrated Nanoelectronics. NanoScience and Technology. Springer, New Delhi. https://doi.org/10.1007/978-81-322-3625-2_9

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