Downscaling Classical MOSFET

  • Vinod Kumar Khanna
Part of the NanoScience and Technology book series (NANO)


The classical MOSFET serving as the main vehicle carrying integrated circuit technology forward with the help of its opposite polarity NMOS and PMOS devices combined into the well-known CMOS configuration has been constantly downscaled. Riding on the classical MOSFET workhorse, integrated circuits have steadily marched a long way towards the nanoscale. Constant field and constant voltage scaling schemes have been applied. The downscaling succeeded to a large extent in meeting the predictions of the Moore’s law before succumbing to physical limitations. Various problems encountered in moving towards smaller geometry devices are outlined and restrictions on downscaling supply and threshold voltages are laid down. The extent of solutions possible with classical MOSFET structure is indicated. Through such technological innovations, the classical MOSFET progressed unless it was realized that revolutionary process and structural improvements were necessary. The chapter surveys the scaling issues and looks at the solutions to the problems in the perspective of classical MOSFET device.


Threshold Voltage Subthreshold Slope Subthreshold Swing Threshold Voltage Shift Threshold Voltage Versus 
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Copyright information

© Springer India 2016

Authors and Affiliations

  1. 1.MEMS and Microsensors GroupCSIR-Central Electronics Engineering Research InstitutePilaniIndia

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