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Nanocharacterization Techniques

  • Vinod Kumar Khanna
Chapter
Part of the NanoScience and Technology book series (NANO)

Abstract

During or after fabrication of nanoelectronic devices, it is necessary to qualitatively and quantitatively assess nanomaterial properties. A stringent monitoring of the process is necessary to assure compliance with design layout to achieve desired electrical performance. Besides, in several nanotechnology experiments, particularly those related to biosensors, biomolecules are used. During these experiments as well as in device fabrication, the nanotechnologist is required to perform measurements on both soft and hard samples and those in solid or fluid state. For these measurements, a vast gamut of simple/complex instrumentation is available. These equipments are used for surface topographical studies, grain and particle size determination, defect and elemental composition analysis. Under the microscopy head fall scanning probe microscopes, and scanning and transmission microscopes. X-ray-based analysis tools include energy dispersive X-ray analysis , X-ray diffraction , and X-ray photoelectron spectroscopy . Important optical spectroscopic techniques are infrared spectroscopy , ultraviolet and visible spectroscopy , and Raman spectroscopy . Size distribution of dispersions of nanoparticles in liquid media is studied by photon correlation spectroscopy . Stability of dispersions is predicted by zeta potential analysis. Noncontact vibratory motion measurements of objects are performed by laser Doppler vibrometry . An overview of these nanocharacterization techniques is presented herein. Operation, relative merits and demerits, limitations and applications of these techniques are described.

Keywords

Atomic Force Microscopy Zeta Potential Scan Tunneling Microscopy Reference Beam Mode Atomic Force Microscopy 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer India 2016

Authors and Affiliations

  1. 1.MEMS and Microsensors GroupCSIR-Central Electronics Engineering Research InstitutePilaniIndia

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