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Piezoceramic Coatings for MEMS and Structural Health Monitoring

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Micro and Smart Devices and Systems

Part of the book series: Springer Tracts in Mechanical Engineering ((STME))

Abstract

The advent of smart materials has given a new dimension to the field of Materials Science, resulting in many significant application-oriented developments in all fields of engineering. Piezoelectric material is an important member of the smart material family. Bulk piezo sensors and actuators have been used widely for smart structure applications. The limitation in using piezoceramic material in its bulk form as sensors and actuators in real applications is due to its brittleness, nonconformability, high temperature processing, small area coverage, and associated ill effects of using an adhesive bond layer for attaching them. In situ piezo transducers, covering a large area, provide a very good solution circumventing aforementioned problems. The indigenous development of a smart and conformal piezoceramic coating with a low process temperature makes it suitable for Silicon batch processing not only for the fabrication of piezoceramic MEMS but also for the Nondestructive Evaluation (NDE) of metals and composites in guided wave-based real-time Structural Health Monitoring (SHM). This chapter presents the development of application-specific in situ piezoeceramic coating and the technical challenges therein.

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References

  1. Polla DL, Francis LF (1998) Processing and characterization of piezoelectric materials and integration into microelectromechanical systems. Annu Rev Mater Sci 28:563–597

    Article  Google Scholar 

  2. Trolier-McKinstry S, Muralt P (2004) Thin Film Piezoelectrics for MEMS. J Electroceram 12:7–17

    Article  Google Scholar 

  3. Muralt P (2000) PZT thin films for microsensors and actuators: where do we stand? IEEE T UFFC 47:903–915

    Article  Google Scholar 

  4. Jang LS, Kuo KC (2007) Fabrication and characterization of PZT thick films for sensing and actuation. Sensors 7:493–507

    Article  Google Scholar 

  5. Wang Z, Miao J, Zhu W (2007) Piezoelectric thick films and their application in MEMS. J Eur Ceram Soc 27:3759–3764

    Article  Google Scholar 

  6. Corker DL, Zhang Q, Whatmore RW et al (2002) PZT ‘composite’ ferroelectric thick films. J Eur Ceram Soc 22:383–390

    Article  Google Scholar 

  7. Pandey SK, James AR, Raman R et al (2005) Structural, ferroelectric and optical properties of PZT thin films. Phys B 369:135–142

    Article  Google Scholar 

  8. Tyholdt F, Dorey RA, Bredesen R et al (2007) Novel patterning of composite thick film PZT. J Electroceram 19:315–319

    Article  Google Scholar 

  9. Gang J, Qingxian H, Sheng L, Dongxiang Z, Qiuyun F (2012) Effect of solid content variations on PZT slip for tape casting. Process Appl Ceram 6(4):215–221

    Article  Google Scholar 

  10. Dietze M, Es-Souni M (2008) Structural and functional properties of screen-printed PZT–PVDF-TrFE composites. Sensor Actuat A 143:329–334

    Article  Google Scholar 

  11. Lebedev M, Akedo J, Akiyama Y (2000) Actuation properties of lead zirconate titanate thick films structured on Si membrane by the aerosol deposition method. Jpn J Appl Phys 39:5600–5606

    Article  Google Scholar 

  12. Akedo J, Lebedev M (2001) Influence of carrier gas conditions on electrical and optical properties of Pb(Zr, Ti)O3 thin films prepared by aerosol deposition method. Jpn J Appl Phys 40:5528

    Article  Google Scholar 

  13. Chou C, Tsai S, Tu W et al (2007) Low-temperature processing of sol-gel derived Pb(Zr, Ti)O3 thick films using CO2 laser annealing. J Sol-Gel Sci Technol 42:315–322

    Article  Google Scholar 

  14. Wang ZJ, Cao ZP, Otsuka Y et al (2008) Low-temperature growth of ferroelectric lead zirconate titanate thin films using the magnetic field of low power 2.45 GHz microwave irradiation. Appl Phys Lett 92:222905–222905-3

    Google Scholar 

  15. Dutta S, Jeyaseelan A, Sruthi S (2013) Low temperature processing of PZT thick film by seeding and high energy ball milling and studies on electrical properties. J Electron Mater 42(12):3524–3528

    Article  Google Scholar 

  16. Chen YZ, Ma J, Kong LB, Zhang RF (2002) Seeding in sol–gel process for Pb(Zr0. 52Ti0 48)O3 powder fabrication. Mater Chem Phys 75:225–228

    Article  Google Scholar 

  17. Zhao QL, Cao MS, Yuan J et al (2010) Thickness effect on electrical properties of Pb(Zr0.52Ti0.48)O3 thick films embedded with ZnO nanowhiskers prepared by a hybrid sol-gel route. Mater Lett 64:632–635

    Article  Google Scholar 

  18. Hu SH, Hu GJ, Meng XJ et al (2004) The grain size effect of the Pb(Zr0.45Ti0.55)O3 thin films deposited on LaNiO3-coated silicon by modified sol-gel process. J Cryst Growth 260:109–114

    Article  Google Scholar 

  19. Boukamp BA, Pham MTN, Blan DHA et al (2004) Ionic and electronic conductivity in lead–zirconate–titanate (PZT). Solid State Ionics 170:239–254

    Article  Google Scholar 

  20. Muralt P, Kohli M, Maeder T et al (1995) Fabrication and characterization of PZT thin-film vibrators for micromotors. Sensor Actuat A 48:157–165

    Article  Google Scholar 

  21. Muralt P, Kholkin A, Kohli M et al (1995) Fabrication and characterization of PZT thin films for micromotors. Integr Ferroelectr 11:213–220

    Article  Google Scholar 

  22. Muralt P, Ledermann N, Baborowski J et al (2005) Piezoelectric micromachined ultrasonic transducers based on PZT thin films. IEEE Trans Ultrason Ferroelect Freq Contr 52:2276–2288

    Article  Google Scholar 

  23. Deshpande M, Saggere L (2007) PZT thin films for low voltage actuation: Fabrication and characterization of the transverse piezoelectric coefficient. Sensor Actuat A 135:690–699

    Article  Google Scholar 

  24. Damjanovic D (2005) The Science of hysteresis. In: Mayergoyz I, Bertotti G (eds.) Hysteresis in piezoelectric and ferroelectric materials, vol 3. Elsevier, Amsterdam

    Google Scholar 

  25. Henning AK, Patel S, Selser M et al (2004) Factors affecting silicon membrane burst strength. Proc SPIE 5343:145–153

    Article  Google Scholar 

  26. Yuanxia X, Zhenqing L (1999) Analysis of ultrasonic waves in plates by geometrical ultrasonics and its applications. Nondestruct Test 21(12):53

    Google Scholar 

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Acknowledgments

I thank NPMASS for the funding in support of this research under the project “Acousto-ultrasonic coating for structural health monitoring” -PARC 1:2. I also thank Prof. D. Roy Mahapatra, Aerospace Engineering, IISc-Bangalore for his contribution and suggestions on SHM experiments.

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Authors and Affiliations

  1. Materials Science Division, CSIR-National Aerospace Laboratories, Bangalore, India

    Soma Dutta

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  1. Soma Dutta
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Correspondence to Soma Dutta .

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Editors and Affiliations

  1. Electrical Communication Engineering, Indian Institute of Science, Bangalore, Karnataka, India

    K. J. Vinoy

  2. Mechanical Engineering, Indian Institute of Science, Bangalore, Karnataka, India

    G. K. Ananthasuresh

  3. Centre Nano Science and Engineering, Indian Institute of Science, Bangalore, Karnataka, India

    Rudra Pratap

  4. Materials Research Centre, Indian Institute of Science, Bangalore, Karnataka, India

    S. B. Krupanidhi

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Dutta, S. (2014). Piezoceramic Coatings for MEMS and Structural Health Monitoring. In: Vinoy, K., Ananthasuresh, G., Pratap, R., Krupanidhi, S. (eds) Micro and Smart Devices and Systems. Springer Tracts in Mechanical Engineering. Springer, New Delhi. https://doi.org/10.1007/978-81-322-1913-2_13

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  • DOI: https://doi.org/10.1007/978-81-322-1913-2_13

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  • Publisher Name: Springer, New Delhi

  • Print ISBN: 978-81-322-1912-5

  • Online ISBN: 978-81-322-1913-2

  • eBook Packages: EngineeringEngineering (R0)

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