Growth of Particles in a Plasma
The presence of particles in a plasma reactor is of serious concerns to microelectronic industry, material science, and other areas. Dust in plasma reactors causes irrecoverable defects and line shorts in large-scale integrated circuits. However, the emphasis has recently changed from considering dust as a process killer to recognizing it as a desired feature with numerous applications like (i) plasma-assisted assembly of carbon-based nanostructures, (ii) plasma-enhanced CVD of nanostructure silicon-based films, (iii) high rate deposition of clusters and particles on nanostructure films, etc. A discussion of the deleterious and beneficial aspects of complex plasma in micro electronic industry has been given in the classic book by Vladimirov et al. . For a rational design of such applications, it is necessary to have an appreciation of the physics and chemistry of the formation and growth of the dust particles in a plasma.
KeywordsDust Particle Neutral Atom Dusty Plasma Plasma Reactor Neutral Species
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