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Bi Based Oxide Superconducting Thin Film Prepared by CVD Method

  • Ken-ichi Saikusa
  • Tadashi Sugihara
  • Takuo Takeshita
Conference paper

Abstract

BiSrCaCuO superconducting thin films were prepared on MgO (100) substrates by metal organic chemical vapor deposition (MOCVD) using Bi(ph)3, Sr-, Ca-, Cu(DPM)2, and effects of deposition parameters (substrate temperatures (Ts), oxygen flow rates (FO2) and cooling rates (C.R)) were investigated with regards to superconducting properties of films. A film as prepared at Ts=800°C, in FO2=200ccm, and with C.R=15°C/min possesses the (2212) structure. This film shows a micro mosaic structure with c-axis orientation perpendicular to the substrate, and has zero-resistance temperature of 72K.

Keywords

Cool Rate Substrate Temperature Metal Organic Chemical Vapor Deposition Oxygen Flow Rate Pulse Laser Evaporation 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

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Copyright information

© Springer Japan 1990

Authors and Affiliations

  • Ken-ichi Saikusa
    • 1
  • Tadashi Sugihara
    • 1
  • Takuo Takeshita
    • 1
  1. 1.Central Research InstituteMitsubishi Metal CorporationSaitama 330Japan

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