Bi Based Oxide Superconducting Thin Film Prepared by CVD Method
BiSrCaCuO superconducting thin films were prepared on MgO (100) substrates by metal organic chemical vapor deposition (MOCVD) using Bi(ph)3, Sr-, Ca-, Cu(DPM)2, and effects of deposition parameters (substrate temperatures (Ts), oxygen flow rates (FO2) and cooling rates (C.R)) were investigated with regards to superconducting properties of films. A film as prepared at Ts=800°C, in FO2=200ccm, and with C.R=15°C/min possesses the (2212) structure. This film shows a micro mosaic structure with c-axis orientation perpendicular to the substrate, and has zero-resistance temperature of 72K.
KeywordsCool Rate Substrate Temperature Metal Organic Chemical Vapor Deposition Oxygen Flow Rate Pulse Laser Evaporation
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