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Effects of Heat Treatment on Crystalline Quality of Er-Ba-Cu-O Thin Films

  • Kazumasa Takagi
  • Tsutomu Ishiba
  • Toshiyuki Aida
  • Tokuumi Fukazawa
  • Katsuki Miyauchi
Conference paper

Abstract

ErBa2 Cu3 O7 epitaxial films are prepared on heated MgO substrates by r.f. magnetron sputtering, and changes in crystallinity during annealing are examined by an X-ray diffraction method. Plane spacing parallel to film plane (001) is as large as that in the oxygen deficient semiconductor phase. However, the film becomes a superconductor at low temperatures. Recrystallization of the amorphous region in the as-sputtered film occurs during the annealing. Plane spacing decreases and crystallinity is improved in this process. It is assumed that plane spacing enlargement is due to stress related to epitaxial growth.

Keywords

Epitaxial Growth Film Plane Plane Spacing Strontium Titanate Annealed Film 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Japan 1989

Authors and Affiliations

  • Kazumasa Takagi
    • 1
  • Tsutomu Ishiba
    • 1
  • Toshiyuki Aida
    • 1
  • Tokuumi Fukazawa
    • 1
  • Katsuki Miyauchi
    • 1
  1. 1.Central Research LaboratoryHitachi Ltd.Kokubunji, Tokyo, 185Japan

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