Transport Properties of High Tc Y-Ba-Cu-O Thin Films Made by RF Magnetron Sputtering
High Tc YBCO thin films were prepared on MgO(100) single crystal substrates by rf magnetron sputtering. In order to obtain fine control of the composition of thin films, three targets sequential sputtering technique was used. Similar to single target sputtering, sputtered polycrystalline films had completely oriented c-axis. After heat treatment in flowing oxygen, the best measured critical current density at 77K was 105A/cm2 . In order to investigate the effect of the heat treatment, lattice constant co of the film at various temperature was measured by XRD. The Cu-O structure in the film was also studied by using static SIMS for the first time.
KeywordsCritical Current Density Incident Power YBCO Film Single Crystal Substrate YBCO Thin Film
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