High Tc Superconductor YBa2Cu3O7-x Thin Films Obtained by RF Magnetron Sputtering
High temperature superconductor YBa2Cu3O7-x and similar rare earth compounds were prepared as thin films with superconducting transitions above 77 K by a number of authors. By that the best results were obtained on single crystal SrTiO substrates where unit cell parameters and crystal structure are close to those for YBa2Cu3O7-x compound [1,2] .SrTiO3 crystals are difficult to grow so the price of the crystals is rather high. Besides high dielectric constant (ɛ~300) of strontium titanate is a great obstacle for ultra-high frequency device applications of the superconducting films.
KeywordsHigh Temperature Superconductor Film Deposition Strontium Titanate Superconducting Film Condensation Coefficient
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- 1.Y.Enomoto T.Murakami, M.Suzuki, K.Moriwaki. Jap.J.Appl.Phys.,1987, v.28, No. 7, p. L 1248.Google Scholar