Properties of Superconducting Bi-Sr-Ca-Cu-O Thin Films Prepared by Controlling Sputtering Conditions and Annealing Atmospheres
Bi-Sr-Ca-Cu-0 thin films were prepared by using a rf magnetron sputtering. The films were grown on MgO substrates at 300°C cyclically by sputtering through an off-centered shutter hole while rotating the substrate table. Then the films were annealed at 860°C for 10 hours in the mixture of O2/N2=1/10.
The thin films had no segregation of the constituent elements and showed a high critical temperature of Tc(on)=120K and Tc(zero)=103K.
KeywordsElectron Probe Micro Analysis Element Dispersion High Critical Temperature Element Segregation Zero Resistivity
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