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Properties of Superconducting Bi-Sr-Ca-Cu-O Thin Films Prepared by Controlling Sputtering Conditions and Annealing Atmospheres

  • K. Ohbayashi
  • T. Ushida
  • T. Tsunooka
  • K. Ohya
  • H. Banno
Conference paper

Abstract

Bi-Sr-Ca-Cu-0 thin films were prepared by using a rf magnetron sputtering. The films were grown on MgO substrates at 300°C cyclically by sputtering through an off-centered shutter hole while rotating the substrate table. Then the films were annealed at 860°C for 10 hours in the mixture of O2/N2=1/10.

The thin films had no segregation of the constituent elements and showed a high critical temperature of Tc(on)=120K and Tc(zero)=103K.

Keywords

Electron Probe Micro Analysis Element Dispersion High Critical Temperature Element Segregation Zero Resistivity 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Japan 1989

Authors and Affiliations

  • K. Ohbayashi
    • 1
  • T. Ushida
    • 1
  • T. Tsunooka
    • 1
  • K. Ohya
    • 1
  • H. Banno
    • 1
  1. 1.NTK Technical Ceramics DivisionNGK Spark Plug Co., Ltd.Mizuho-ku, Nagoya, 467Japan

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