Abstract
Superconductive YBaCuO films were deposited by reactive rf sputtering on MgO and several kinds of metals. The changes of the film composition were studied with respect to sputtering parameters. The as-sputtered film deposited on MgO at about 650 °C revealed a comparatively good superconductivity. A preferential growth of ab planes took place on MgO , while no preferential growth was observed on the metal substrates. The surface morphology was strongly affected mainly by chemical properties of the metals.
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© 1989 Springer Japan
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Maeda, K. et al. (1989). Preparation and Characterization of High Tc Superconductive Thin Film. In: Kitazawa, K., Ishiguro, T. (eds) Advances in Superconductivity. Springer, Tokyo. https://doi.org/10.1007/978-4-431-68084-0_90
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DOI: https://doi.org/10.1007/978-4-431-68084-0_90
Publisher Name: Springer, Tokyo
Print ISBN: 978-4-431-68086-4
Online ISBN: 978-4-431-68084-0
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