Ln-Ba-Cu-O Thin Film Deposited by Ion Beam Sputtering
We have successfully fabricated the high quality yttrium barium copper oxide ( YBCO ) thin film with Tco=88K and ytterbium barium copper oxide ( YbBCO ) film with Tco =77K by the method of Ion Beam Sputtering. The as-grown films ( YBCO and YbBCO ) on the MgO substrate showed superconductive transition up to 54 K. To improve the superconductivity, heat treatment was necessary at around 800 C for YbBCO film and around 900 C for YBCO film in the oxygen atmosphere. The opitimized conditions for heat treatment depended on substrate material and film composition.
Three kinds of targets were used, two were oxide targets for the YBCO system and the other was alloy target for the YbBCO system.
The c-axis of the perovskeit structure was perpendicular to a substrate surface for films fabricated on the MgO substrate. On the contrary, for the film deposited on the SrTiO3(100) substrate, the a-b plane was perpendicular to the substrate surface.
KeywordsCritical Current Density Film Composition Barium Copper Alloy Target Oxide Target
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- 8.T.Yotsuya,Y.Suzuki, S.Ogawa, H.Kuwahara, K.Otani, T.Eraoto and J.Yamamoto; Procceeding of ICMC-88(Shenyang, China) to be published.Google Scholar