High-Tc Superconductor Prepared by Chemical Vapor Deposition

  • Kazuhiko Shinohara
  • Fumio Munakata
  • Mitsugu Yamanaka
Conference paper


Y-Ba-Cu-O films were prepared by chemical vapor deposition using tris(2,2,6,6-tetramethyl-3,5-heptanedionato)yttrium(III) (Y(DPM)3), bis(1,1,1,5,5,5-hexafluoro-2 ,4-pentanedionato)barium(II) (Ba(HFA)2) and bis(1,1,1,5,5,5-hexafluoro-2 , 4-pentanedionato)copper(II) (Cu(HFA)2). A typical Y-Ba-Cu-O film on a (001) SrTi03 substrate exhibited the presence of the YBa2Cu3Oy phase after an annealing process according to X-ray diffraction patterns, and a superconducting transition was obtained with Tc(onset) = 83 K and Tc(zero resistance) = 65 K.


Chemical Vapor Deposition Differential Thermal Analysis Inductively Couple Plasma Mass Spectroscopy Auger Electron Spectroscopy Deposition Condition 
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Copyright information

© Springer Japan 1989

Authors and Affiliations

  • Kazuhiko Shinohara
    • 1
  • Fumio Munakata
    • 1
  • Mitsugu Yamanaka
    • 1
  1. 1.Materials Research Laboratory, Central Engineering LaboratoriesNissan Motor Co., LtdYokosuka, 237Japan

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