Formation of Crystallized Buffer Layer for High-Tc Superconducting Thin Film
For the formation of high-Tc superconducting thin films, ceramic single crystal substrates which are made of MgO,SrTiO 3 , YSZ( Yttrium Stabilized Zirconia ),etc.,have been used. For the application of the high-Tc superconducting thin film for electric devices, superconducting tapes,electromagnetic shields,and etc.,however,it is necessary to develope the techniqus which can make the high Tc superconducting thin films on Si wafer,metal,and/or glass substrates.
To get the YSZ and MgO films which have adequate crystallization and orientation as a bufer layer, coating conditions of RF magnetron Ion plating method and RF magnetron sputtering method were investigated.
Y-Ba-Cu-O thin films by RF magnetron sputtering were grown on the buffer layer and those properties were examined.
KeywordsBuffer Layer Superconducting Film Quartz Glass Substrate Electromagnetic Shield Buffer Film
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