Formation of Crystallized Buffer Layer for High-Tc Superconducting Thin Film

  • Jōji Shinohara
  • Yuji Ikegami
  • Teruaki Kawamoto
Conference paper


For the formation of high-Tc superconducting thin films, ceramic single crystal substrates which are made of MgO,SrTiO 3 , YSZ( Yttrium Stabilized Zirconia ),etc.,have been used. For the application of the high-Tc superconducting thin film for electric devices, superconducting tapes,electromagnetic shields,and etc.,however,it is necessary to develope the techniqus which can make the high Tc superconducting thin films on Si wafer,metal,and/or glass substrates.

To get the YSZ and MgO films which have adequate crystallization and orientation as a bufer layer, coating conditions of RF magnetron Ion plating method and RF magnetron sputtering method were investigated.

Y-Ba-Cu-O thin films by RF magnetron sputtering were grown on the buffer layer and those properties were examined.


Buffer Layer Superconducting Film Quartz Glass Substrate Electromagnetic Shield Buffer Film 
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Copyright information

© Springer Japan 1989

Authors and Affiliations

  • Jōji Shinohara
    • 1
  • Yuji Ikegami
    • 1
  • Teruaki Kawamoto
    • 1
  1. 1.Research InstituteIshikawajima-Harima Heavy Industries Co., Ltd.Koto-ku, Tokyo, 135Japan

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