Observations of Y-Ba-Cu-O Films by Scanning Electron Microscopy and Auger Electron Spectroscopy

  • Kengo Ishiyama
  • Yasuyuki Kageyama
  • Yasunori Taga
Conference paper


Structures of Y-Ba-Cu-O sputter-deposited films were investigated by Scanning Electron Microscopy (SEM) and Auger Electron Spectroscopy (AES). After heat treatment, the films showed different morphology for different substrates, i.e., A12O3 and MgO, and for different thicknesses of 0.1 μm and 1.2 μm. Only for YBaCuO(P.1μm)/MgO, highly oriented crystal growth is seen, and for other systems, inhomogeneous crystal growths are seen. An interface roughning caused by preferential interdiffusion of Ba into an A12O3 substrate was observed. A surface enrichment of Cu is found for the thick films. These differences in morphology are considered to be due to the differences in the diffusion processes.


Auger Electron Spectroscopy Grain Shape Surface Enrichment Interdiffusion Zone Surface Inter 
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Copyright information

© Springer Japan 1989

Authors and Affiliations

  • Kengo Ishiyama
    • 1
  • Yasuyuki Kageyama
    • 1
  • Yasunori Taga
    • 1
  1. 1.Toyota Central Research and Development Laboratories, Inc.Aichi, 480-11Japan

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