Diagnosing Semiconductor Nano-Materials and Devices

  • Motoichi Ohtsu


In this chapter, we describe the near-field photoluminescence (PL) spectroscopy of semiconductor micro/nano structures fabricated on opaque substrates. In such experiments, several specific techniques are necessary compared with the standard measurements shown in other chapters, from the viewpoints of probe structures, optical configurations, signal detections, and so on. In particular, the protruded probe (see Sect. 4.1 and Fig. 4.1) with a small foot diameter is not suitable for such measurements from the aspects of sensitivity and contrast. To date, even without high resolution, the experimental results obtained with an apertured probe (see Fig. 4.1) have been much more informative than data obtained using a protruded probe. Almost all the experiments in this chapter were performed using an apertured probe with foot diameters, d f, from 100 nm to 1 μm.


Excitation Power Topographic Image Fiber Probe Slant Angle Evanescent Mode 
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Copyright information

© Springer Japan 1998

Authors and Affiliations

  • Motoichi Ohtsu
    • 1
  1. 1.Interdisciplinary Graduate School of Science and EngineeringTokyo Institute of TechnologyMidori-ku YokohamaJapan

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