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Electron Energy-Loss Spectroscopy

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Analytical Electron Microscopy for Materials Science

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Abstract

Electron energy-loss spectroscopy (EELS) is one of the most popular analytical electron microscopy techniques, similar to energy dispersive X-ray spectroscopy (EDS). In the past, EELS was thought to be effective in compositional analysis only for light elements but useless in general for quantitative analysis in comparison with EDS. However, the accuracy of analysis by EELS is much improved recently owing to high performance of the detector and usage of a FEG. Furthermore, an energy-filter system that provides energy-filtered images has been installed on an electron microscope. Thus, currently EELS has attracted much attention for new applications such as elemental mapping and background subtraction in electron diffraction patterns.

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Authors and Affiliations

  1. Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, 2-2-1 Katahira, Sendai, Miyagi, 980-8577, Japan

    Daisuke Shindo (Dr., Professor)

  2. Application and Research Center, JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, 196-8558, Japan

    Tetsuo Oikawa (Dr., Chief Researcher)

Authors
  1. Daisuke Shindo
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  2. Tetsuo Oikawa
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© 2002 Springer Japan

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Shindo, D., Oikawa, T. (2002). Electron Energy-Loss Spectroscopy. In: Analytical Electron Microscopy for Materials Science. Springer, Tokyo. https://doi.org/10.1007/978-4-431-66988-3_3

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  • DOI: https://doi.org/10.1007/978-4-431-66988-3_3

  • Publisher Name: Springer, Tokyo

  • Print ISBN: 978-4-431-70336-5

  • Online ISBN: 978-4-431-66988-3

  • eBook Packages: Springer Book Archive

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