Fabrication of YBCO Thin Films by Electron Beam Deposition with Double Sources
We fabricated YBCO thin films by using the electron beam deposition apparatus with double hearths, in which Y2O3 and Ba2Cu3Ox are contained. By changing deposition time for Y2O3, the composition Y2O3:Ba2Cu3Ox was controlled. The prepared films were sintered at 95000C for 6 hours in air and annealed at 450°C for 5 hours in oxygen. The phase of the prepared films was analyzed by the XRD method. It was found that when the Y2O3 deposition time ranged from 4 to 12 minutes, the cation ratio, Y:Ba:Cu was controlled to be 1:2:3, and Tcon was raised as high as 83K. When the Y2O3 deposition time exceeded more than 16 minutes, the amount of the Y211 phase was increased with increasing the Y2O3 deposition time.
KeywordsScanning Electron Microscope Image Deposition Time YBCO Film Prepared Film Cation Ratio
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