Advertisement

Electron Beam Damage to Specimens

  • Nobuo Tanaka
Chapter

Abstract

The incidence of electron waves in TEM and STEM causes the transmission of electrons (=electric current) with a high energy larger than 100 keV. Particularly, heating of specimens by the Joule heat, knock-on at an atomic nucleus due to the momentum transfer from moving electrons, and bond breaking due to electronic excitation are occurred. As a result, atomistic structures are changed, which is named electron irradiation effects or damages.

Keywords

Atomic Nucleus Electron Irradiation Quantum Noise Incident Electron Electric Excitation 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

References

  1. Bethe, H. (1930). Annalen der Physik, 5, 325.CrossRefGoogle Scholar
  2. Hobbs, L. W. (1983). In Quantitative electron microscopy, J. N. Chapman & A. J. Craven (Eds.), (Proceedings of 25th Scottish University School in Physics).Google Scholar
  3. Kruit, P., et al. (2016). Ultramicroscopy, 164, 31.Google Scholar

Copyright information

© Springer Japan KK 2017

Authors and Affiliations

  1. 1.Nagoya UniversityNagoyaJapan

Personalised recommendations