Elemental Analysis by Electron Microscopes

– Analysis Using an Electron Probe –


Typical methods for elemental and physical analyses are electron probe microanalysis (EPMA) and Auger electron spectroscopy(AES).


Electron Diffraction Auger Electron Spectroscopy Analytical Electron Microscopy Radial Distribution Function Electron Probe Microanalysis 
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  1. Krivanek, O., et al. (2013). Microscopy, 62, 3.CrossRefGoogle Scholar
  2. Williams, D. B., & Carter, C. B. (2009). Transmission electron microscopy (Vol. 4). New York: Springer.Google Scholar

Copyright information

© Springer Japan KK 2017

Authors and Affiliations

  1. 1.Nagoya UniversityNagoyaJapan

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