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Elemental Analysis by Electron Microscopes

– Analysis Using an Electron Probe –
  • Nobuo Tanaka
Chapter

Abstract

Typical methods for elemental and physical analyses are electron probe microanalysis (EPMA) and Auger electron spectroscopy(AES).

Keywords

Electron Diffraction Auger Electron Spectroscopy Analytical Electron Microscopy Radial Distribution Function Electron Probe Microanalysis 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

References

  1. Krivanek, O., et al. (2013). Microscopy, 62, 3.CrossRefGoogle Scholar
  2. Williams, D. B., & Carter, C. B. (2009). Transmission electron microscopy (Vol. 4). New York: Springer.Google Scholar

Copyright information

© Springer Japan KK 2017

Authors and Affiliations

  1. 1.Nagoya UniversityNagoyaJapan

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