As described in detail already, environmental friendliness is needed for sustainable development. There are two basic ways to make the surface finishing process more environmentally friendly. One of them is the substitution of hazardous materials with harmless substances. The other one is the utilization of a closed system for surface finishing/coating. From the viewpoint, physical vapor deposition (PVD) and chemical vapor deposition (CVD) seem to be the most favorable processes, since both have already been established. In this chapter, we describe both processes and discuss the effectiveness and possibility of changes from the conventional plating process to a dry process.
KeywordsChemical Vapor Deposition Physical Vapor Deposition Environmental Friendliness Chemical Vapor Deposition Process Metal Nitride
- 1.Surface treatment technology – fundamentals and Application edited by Surface Finishing Society, Nikkan Kogyo Newspaper Co. Feb. 2000 ISBN 4-526-04522-5Google Scholar