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Development of JEOL SIPs

  • Nagamitsu Yoshimura
Chapter
Part of the SpringerBriefs in Applied Sciences and Technology book series (BRIEFSAPPLSCIENCES)

Abstract

Philips (Holland) put an EM equipped with a large SIP place on the market early 1980s first in the world. The SIP had three ports for the gun chamber, for the specimen chamber, and for the evacuation pipe to the diffusion pump. The SIP was apparently dedicated for the Philips EMs. We had to develop the JEOL SIPs dedicated for our JEMs, as Philips did. We must develop two types of SIP, one having high pumping speeds in ultrahigh-vacuum region, and the other having stable pumping performance for inert gases such as Ar for thinning specimens in AES (Auger-electron spectrometer), together with the good performance in UHV.

Keywords

Discharge Intensity Diode Pump Sticking Probability Anode Cell Magnet Assembly 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© The Author(s) 2014

Authors and Affiliations

  • Nagamitsu Yoshimura
    • 1
  1. 1.Kokubunji TokyoJapan

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