Abstract
Some accidents sometimes occurred on the vacuum systems of JEMs. We must resolve them as soon as possible. A backstreaming accident occurred on a customer’s EM was, indeed, a most severe one for us, the vacuum engineers of JEOL. In that case the lead-glass window of the viewing chamber got gloomy after EM-film magazine was exchanged.
Accidents and information on the vacuum systems of the JEMs always instructed us how to improve the vacuum systems of JEMs.
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References
Yoshimura N (1990) Discussion on methods for measuring the outgassing rate. J Vac Soc Jpn 33(5):475–481 (in Japanese)
Takada T, Yoshimura N, JEOL Co. Ltd (1984) Patent no 1984–35,502, 29 Aug 1984
Heide HG (1962) The prevention of contamination without beam damage to the specimen. In: Fifth international congress for electron microscopy A-4
Yoshimura N (1989) Water vapor permeation through Viton O ring seals. J Vac Sci Technol A 7(1):110–112
Hablanian MH, Maliakal JC (1973) Advances in diffusion pump technology. J Vac Sci Technol 10(1):58–64
Watanabe H, Yoshimura N, Katoh S, Kobayashi N (1987) Microdischarges on an electron gun under high vacuum. J Vac Sci Technol A 5(1):92–97
Yoshimura N, Kobayashi N, JEOL Co. Ltd (1984) Patent no 1984–35,502, 18 May 1984
Yoshimura N, Oikawa H (1970) Observation of polymerized films induced by irradiation of electron beams. J Vac Soc Jpn 13(5):171–177 (in Japanese)
Ambrose BK, Holland L, Laurenson L (1972) Reduction of polymer growth in electron microscopes by use of a fluorocarbon oxide pump fluid. J Microscopy 96(Pt 3):389–391
Holland L, Laurenson L, Hurley RE, Williams K (1973) The behaviour of perfluoropolyether and other vacuum fluids under ion and electron bombardment. Nucl Instrum Methods 111:555–560
Dennis NTM, Laurenson L, Devaney A, Colwell BH (1982) The effect of the inlet valve on the ultimate vacua above integrated pumping groups. Vacuum 32(10/11):631–633
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Yoshimura, N. (2014). Accidents and Information, Instructing Us to Improve the Vacuum Systems of JEMs. In: Historical Evolution Toward Achieving Ultrahigh Vacuum in JEOL Electron Microscopes. SpringerBriefs in Applied Sciences and Technology. Springer, Tokyo. https://doi.org/10.1007/978-4-431-54448-7_3
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DOI: https://doi.org/10.1007/978-4-431-54448-7_3
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