Semiconductor Production



Semiconductor devices are used in electronics products such as PCs, mobile phones and game machines. Applications have been expanding further to automobiles, home appliances, etc. in line with the progress in IT technologies. The integration degree of semiconductor devices has become denser year after year responding to advances in integration capability, process design rules, and productivity has been improved by means of the increase in the diameter of silicon wafers. The process design rule of 45 nm between metallization lines and a wafer diameter of 300 mm are currently in the main stream, and semiconductor manufacturing equipment is required to produce larger wafers of 450 mm in the future with higher accuracy. The microfabrication technologies and processing technologies developed for semiconductor devices are incorporated in flat panel displays and their production technologies, contributing to the recent rapid progress of the display industry.


Cast Iron Metal Matrix Composite Chemical Vapor Deposition Method Projector Lens Hydrostatic Bearing 
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Copyright information

© Springer Japan 2012

Authors and Affiliations

  1. 1.TokyoJapan

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