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Systemintegration

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Praxiswissen Mikrosystemtechnik

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Ein Mikrosystem ist eine komplexe Einheit von verschiedenen miniaturisierten Komponenten, deren typische Strukturgrößen im Mikrometer- und/oder Nanometerbereich liegen. Bild 4.1-1 zeigt schematisch den Aufbau von Mikrosystemen und versucht, die verwendeten Begriffe zu systematisieren. Komponenten eines Mikrosystems werden meist hinsichtlich ihrer Funktion identifiziert und stellen unter diesem Gesichtspunkt ein eigenständiges Gebilde (Subsystem) dar (z. B. Sensor, Aktor, mikroelektronischer Schaltkreis, Datenspeicher). Man kann sie auch hinsichtlich ihrer primären Funktionalität klassifizieren, z. B. als mikromechanische, mikrooptische, mikrofluidische Komponente.

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(2006). Systemintegration. In: Praxiswissen Mikrosystemtechnik. Vieweg+Teubner. https://doi.org/10.1007/978-3-8348-9105-1_4

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