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Building In Reliability. Is Statistical Process Control Statistical Reliability Control ?

  • James Prendergast
  • Eamonn Murphy
Conference paper
Part of the Frontiers in Statistical Quality Control book series (FSQC, volume 7)

Abstract

This paper deals with the concept of using experimental design to verify the ideals of building in reliability in an integrated circuit fabrication process. The paper focuses on the gate oxide loop, which is one of the most critical steps in the process and uses a combination of a linear L12 Taguchi Array and Central Composite Face Centred Design experimental techniques to prove the Building In Reliability concept. The work will demonstrate that from a quality perspective many nodes are controlled in the process but only certain nodes have an impact on reliability. If these nodes are carefully controlled reliability can be maintained and indeed predicted possibly by using an expert system thus leading to “Statistical Reliability Control”.

Keywords

Failure Time Gate Oxide Statistical Process Control Total Distribution Gate Delay 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 2004

Authors and Affiliations

  • James Prendergast
    • 1
  • Eamonn Murphy
    • 2
  1. 1.Institute of Technology Clash, TraleeCo. KerryIreland
  2. 2.University of LimerickLimerickIreland

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