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Statistical Process Control for Semiconductor Manufacturing Processes

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Summary

This paper considers statistical process control (SPC) for the semiconductor manufacuturing industry, where automatic process adjustment and process maintenance are widely used. However, SPC has been developed in parts industry an, thus, application of SPC to chemical processes such as those in the semiconductor manufacuturinghas not been systematically investigated

Two case studies are presented; one is an example for process adjustment and the other is an example for process maintenance. Either of them is based on control charts and it is discussed how to take into account process autocorrelation.

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References

  • Box, G. E. P. and Kramer, T. (1992), “Statistical Process Monitoring and Feedback Adjustment - A Discussion”, Technometrics, Vol. 34, 251 - 285.

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  • Kawamura, H., Nishina, K., Higashide, M., and Shimazu, Y. (2008), “Integrating SPC and APC in Semiconductor Manufacturing Process”, Quality, Vol. 38, No. 3, 99 - 107 (in Japanese).

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  • Montgomery, D. C., and Friedman, D. J. (1989), “Some Statistical Process Control Methods for Autocorrelated Data”, Journal of Quality Technology, Vol. 23, 179 - 193.

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  • Box, G. E. P., Jenkins, G. M., and Reinsel, G. C. (1994), Time Series Analysis, Forecasting, and Control, 3rd edition, Prentice-Hall, Englewood Cliffs, NJ.

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Author information

Authors and Affiliations

  1. NEC Electronics Corp, 1753, Shimonumabe, Nakahara-Ku, Kawasaki, Kanagawa, 211-8668, Japan

    Masanobu Higashide

  2. Nagoya Institute of Technology, Gokiso-cho, Showa-Ku, Nagoya, Aichi, 466-8555, Japan

    Ken Nishina, Hironobu Kawamura & Naru Ishii

Authors
  1. Masanobu Higashide
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  2. Ken Nishina
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  3. Hironobu Kawamura
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  4. Naru Ishii
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Editor information

Editors and Affiliations

  1. FB Wirtschaftswissenschaft, FU Berlin, Garystr. 21, Berlin, 14195, Germany

    Hans-Joachim Lenz

  2. FB Wirtschaftswissenschaften, FU Berlin, Garystr. 21, Berlin, 14195, Germany

    Peter-Theodor Wilrich

  3. LS für Quantitative Methoden,, Europa-Universität Viadrina, Grosse Scharrnstr. 59, Frankfurt, 15230, Germany

    Wolfgang Schmid

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© 2010 Physica-Verlag Heidelberg

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Higashide, M., Nishina, K., Kawamura, H., Ishii, N. (2010). Statistical Process Control for Semiconductor Manufacturing Processes. In: Lenz, HJ., Wilrich, PT., Schmid, W. (eds) Frontiers in Statistical Quality Control 9. Physica-Verlag HD. https://doi.org/10.1007/978-3-7908-2380-6_5

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