Advertisement

Statistical Process Control for Semiconductor Manufacturing Processes

  • Masanobu Higashide
  • Ken Nishina
  • Hironobu Kawamura
  • Naru Ishii
Chapter

Summary

This paper considers statistical process control (SPC) for the semiconductor manufacuturing industry, where automatic process adjustment and process maintenance are widely used. However, SPC has been developed in parts industry an, thus, application of SPC to chemical processes such as those in the semiconductor manufacuturinghas not been systematically investigated

Two case studies are presented; one is an example for process adjustment and the other is an example for process maintenance. Either of them is based on control charts and it is discussed how to take into account process autocorrelation.

Keywords

Control Chart Process Adjustment Statistical Process Control Principal Component Score Correction Formula 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. Box, G. E. P. and Kramer, T. (1992), “Statistical Process Monitoring and Feedback Adjustment - A Discussion”, Technometrics, Vol. 34, 251 - 285.CrossRefMathSciNetGoogle Scholar
  2. Kawamura, H., Nishina, K., Higashide, M., and Shimazu, Y. (2008), “Integrating SPC and APC in Semiconductor Manufacturing Process”, Quality, Vol. 38, No. 3, 99 - 107 (in Japanese).Google Scholar
  3. Montgomery, D. C., and Friedman, D. J. (1989), “Some Statistical Process Control Methods for Autocorrelated Data”, Journal of Quality Technology, Vol. 23, 179 - 193.Google Scholar
  4. Box, G. E. P., Jenkins, G. M., and Reinsel, G. C. (1994), Time Series Analysis, Forecasting, and Control, 3rd edition, Prentice-Hall, Englewood Cliffs, NJ.MATHGoogle Scholar

Copyright information

© Physica-Verlag Heidelberg 2010

Authors and Affiliations

  • Masanobu Higashide
    • 1
  • Ken Nishina
    • 2
  • Hironobu Kawamura
    • 2
  • Naru Ishii
    • 2
  1. 1.NEC Electronics CorpKawasakiJapan
  2. 2.Nagoya Institute of TechnologyNagoyaJapan

Personalised recommendations